WAFER ALIGN AND ID READING APPARATUS FOR USE OF MULTI SORTER

摘要

A wafer handling apparatus of the multi sorter is provided, in which the identification of the wafer required for each process is arranged in the wafer cassette at the same time and ID is read. A wafer handling apparatus of the multi sorter comprises the sorter(1) and the location moving part(2). The sorter sets up the align roller, the notch finder, and the step motor(43a) on the pad plate. The sorter circulates the align roller and notch finder to the belt connected to each pulley. The sorter performs the wafer align and notch search. The location moving part sets the location of sorter.