JOINT SYSTEM AND JOINT METHOD

摘要

PROBLEM TO BE SOLVED: To improve the jointing accuracy.SOLUTION: A joint system according to an embodiment comprises a thermal treatment device and a joint device. The thermal treatment device has: a first holding part that holds a first substrate with an electrostatic attraction force; a second holding part that holds a second substrate with an electrostatic attraction force; and a first heating part that heats up the first substrate and the second substrate to a first temperature. The joint device comprises: a third holding part that holds the first substrate with an electrostatic attraction force; a fourth holding part that holds the second substrate with an electrostatic attraction force; a second heating part that heats up the first substrate and the second substrate to a second temperature higher than the first temperature; and a pressurizing part that presses the first substrate and the second substrate by making the third holding part and the fourth holding part relatively approach each other.SELECTED DRAWING: Figure 1