发明名称 |
Phase shift mask and method of manufacturing display apparatus using the same |
摘要 |
Provided is a method of manufacturing a display apparatus, the method including forming an amorphous silicon layer on a substrate; changing amorphous silicon in the amorphous silicon layer into crystalline silicon by irradiating the amorphous silicon with a laser beam emitted through a phase shift mask; and forming a display device, the phase shift mask including a base substrate; a barrier layer on the base substrate and including a plurality of transmissive portions which are spaced apart from each other in a first direction; and phase shift portions which alternately fill the plurality of transmissive portions in the first direction. |
申请公布号 |
US9417516(B2) |
申请公布日期 |
2016.08.16 |
申请号 |
US201514794079 |
申请日期 |
2015.07.08 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
Kim Bongyeon;Kang Min;Son Yong;Lee Hyunjoo;Cha Myounggeun;Ju Jinho |
分类号 |
H01L21/00;G03F1/26;G03F7/20;H01L21/02 |
主分类号 |
H01L21/00 |
代理机构 |
Lee & Morse, P.C. |
代理人 |
Lee & Morse, P.C. |
主权项 |
1. A method of manufacturing a display apparatus, the method comprising:
forming an amorphous silicon layer on a substrate; changing amorphous silicon in the amorphous silicon layer into crystalline silicon by irradiating the amorphous silicon with a laser beam emitted through a phase shift mask; and forming a display device, the phase shift mask including: a base substrate; a barrier layer on the base substrate and including a plurality of transmissive portions which are spaced apart from each other in a first direction; and phase shift portions which alternately fill the plurality of transmissive portions in the first direction, the phase shift portions including a material different from the base substrate. |
地址 |
Yongin, Gyeonggi-do KR |