发明名称 SURFACE PROCESSING METHOD AND SURFACE PROCESSOR
摘要 PURPOSE:To shorten the processing time and reduce the quantities of consumed water or power and get a stable and clean surface, concerning a surface processing method which includes the cleaning by the processing liquid which includes sulfuric acid/hydrogen peroxide water. CONSTITUTION:The surfaces of the substances 17a-17j to be processed are processed with the processing liquid consisting of mixed liquid which includes sulfuric acid/hydrogen peroxide water, and then the substances 17a-17j to be processed are washed with water, and subsequently the substances 17a-17j to be processed are heated to remove, by evaporation, the residues of the processing liquid adhering to the surface of the substances 17a-17j to be processed.
申请公布号 JPH0521411(A) 申请公布日期 1993.01.29
申请号 JP19910172696 申请日期 1991.07.12
申请人 FUJITSU LTD 发明人 NAGASHIMA SETSUO
分类号 F26B3/20;G03F1/82;G03F7/40;H01L21/304 主分类号 F26B3/20
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