| 摘要 |
PURPOSE:To verify the mask patterns partially varying in geometrical design rules with high accuracy in a short period of time. CONSTITUTION:The respective verification results of a partial design rule verifying means 7, a region assigning design rule verifying means 8, and a design rule verifying means 10 are edited by a verification error editing means 15 and are outputted by a verification result outputting means 18. The mask pattern verification is executed for each of the mask patterns in correspondence to the respective different design rules by such constitution, by which the verification results are outputted. |
