| 摘要 |
PURPOSE:To enable execution of two operations of observation and measurement, i.e., preparation of an ultrasonic image of a sample and measurement of physical properties of the surface of the substance of the same sample, by one ultrasonic probe which is used for an ultrasonic microscope. CONSTITUTION:An ultrasonic probe has an acoustic lens 1 having a lens surface formed on one end face and a piezoelectric body 3 and necessary electrodes 2, 4a and 4b disposed on the other end face opposite to the above, and it is so constructed that a voltage is impressed on the piezoelectric body 3, an ultrasonic wave thus generated is converged by the lens surface and applied to a sample 12, a reflected wave from the sample 12 is detected by the piezoelectric body 3 and information on the sample is thereby obtained. Moreover, the main body of the acoustic lens 1 is formed of a silicon crystal base, on the surface of which the aforesaid lens face is formed, and the lens face is constructed of a spherical concave 9a generating a converged beam and of at least one cylindrical concave 9a generating a linear beam. This lens face is formed by an etching process for which an etching mask having a prescribed pattern form is used. |
