| 摘要 |
PURPOSE:To provide a means, by which a pushing tool can be floated from a substrate so that the pushing tool is not made to collide with a semiconductor chip on the substrate at the time of shutdown. CONSTITUTION:The gap of a rotor yoke 5 and a stator yoke 9 is set so that magnetic force between the rotor yoke 5 and stator yoke 9 of a linear motor 4 rotating a horn 1 holding a pushing tool 2 is maximized at a position where the pushing tool 2 is floated from a substrate 13. |
