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发明名称
OPTICAL ALIGNMENT AND EXPOSURE APPARATUS
摘要
申请公布号
US3490846(A)
申请公布日期
1970.01.20
申请号
USD3490846
申请日期
1967.06.01
申请人
KASPER INSTRUMENTS INC.
发明人
GOETZ H. KASPER
分类号
B23Q16/02;G02B7/00;G03F9/00;H01L21/027;H01L21/68;(IPC1-7):G03B27/02;G02B21/00;G02B23/00
主分类号
B23Q16/02
代理机构
代理人
主权项
地址
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