| 发明名称 |
TECHNIQUE FOR RECORDING AND TESTING THE REGISTRATION OF SEQUENTIAL MASK SETS |
| 摘要 |
A technique for recording the registration of a sequence of photomasks involves coating a reflective substrate with a photosensitive film and exposing the substrate to light through the first of the sequence of masks until a visible image is obtained. The next mask in the set is then aligned and the procedure repeated.
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| 申请公布号 |
US3647457(A) |
申请公布日期 |
1972.03.07 |
| 申请号 |
USD3647457 |
申请日期 |
1969.10.13 |
| 申请人 |
BELL TELEPHONE LABORATORIES INC. |
发明人 |
ROBERT E. KERWIN |
| 分类号 |
G03C1/73;G03F7/20;G03F9/00;H01L21/00;(IPC1-7):G03C5/04;G03C7/26 |
主分类号 |
G03C1/73 |
| 代理机构 |
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代理人 |
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