| 摘要 |
Methods and apparatus for gauging the surface of a diffusely reflective object by remote optical imaging are disclosed. The invention represents a practical solution to the problem of quickly providing surface measurements with an accuracy in the range of hundreds of a microinch. Two modes of operation, one in which the detector is translated, and the other in which the object is translated are discussed. Also, an analytical relationship which correlates the motion of the probe spot on the object and the motion of the reflected spot on the detector is provided. Variations to certain components of the apparatus and the limits of the more prominent error factors relevant to the invention are developed.
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