| 摘要 |
<p>PURPOSE:To obtain the phase shift reticle which facilitates the repair of a defect of a phase shifter and its manufacture. CONSTITUTION:A light transmission area is formed having a 1st transmission area which has a 1st surface nearly perpendicular to the incidence direction of light, a 2nd transmission area which has a 2nd surface nearly parallel to the 1st surface and at different height from the 1st surface, and a 3rd transmission area which has a 3rd surface nearly parallel to the 1st surface and at different height from the 1st and 2nd surfaces; and 1st light passing through the 1st transmission area is out of phase with 2nd light passing through the 2nd transmission area and substantially in phase with 3rd light transmitted through the 3rd transmission area.</p> |
