| 摘要 |
PURPOSE:To facilitate the removal of image-shaped noises, which are smaller than the minimum shading pitch size of a material under inspection without imposing a load on the processing capability of the hardware or software of an image processing part. CONSTITUTION:A light source part 1, which generated coherent light, and whose beam shape is shaped so that the beam can be cast on a material under inspection having the variable-density pattern, is provided. An optical-system lens part 3, which has the same intensity-distribution evaluation as the minimum variable-density pitch of the material under inspection 2 and forms the image of the material under inspection in an image part 4, is provided. Furthermore, the image input part 4 containing the photoelectric converter, an image processing part 5, which processes the electric signal outputted from the image input part 4, and an output part 6, which outputs the result of the image processing in the image processing part 5, are provided. Thus, the variable- density pitch of the material under inspection is measured. |
