| 摘要 |
PURPOSE:To perform both conductance control and full close, by a method wherein a drive source, regulating the opening of a valve means, forms a motor and a cylinder mechanism. CONSTITUTION:A shaft 14 of a batterfly type valve 8 of an opening part 6 is connected to an electromagnetic clutch 18 through an air cylinder body 16. The both ends of a rack 22 of the air cylinder 16 are of a piston type, and compressed air feed pipes 24 and 26 are installed. The driving force of a motor 28 is transmitted to the shaft 14 through the electromagnetic clutch 18. This constitution eliminates the need for the use of the driving force of the motor during full closing of a valve means, compacts a device, and meanwhile, performs microconductance control during conductance control.
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