| 摘要 |
PURPOSE:To hold the temperature of chemicals at an arbitrarily set temperature with high precision by circulating a heating medium for a constant temperature into a heat medium chamber and bringing the heating medium for the constant temperature into contact with a control means. CONSTITUTION:A control means A is housed in a heat-medium chamber 30, which is connected to a generator 7 for a heating medium for a constant temperature and in which the heating medium for the constant temperature is circulated, thus bringing the heating medium for the constant temperature into contact with the control means A. The heating medium for the constant temperature is brought into contact with the control means A, thus eliminating the effect of the outside air on the control means A. Accordingly, the temperature of chemicals fed to a body to be developed W from the control means A can be controlled at a set value with high accuracy. |
