| 摘要 |
PURPOSE:To enable the title shock load at the tool landing time to be reduced by a method wherein the rated voltage driving step of the Z-axis driving motor is continued from the lowering step starting time to the landing time of a tool. CONSTITUTION:The title wire bonder equipped with a motor 7 for driving a tool in the Z-axis direction is provided with a resistor 8 driving the motor 7 at a motor driving command, a rated voltage circuit comprising an operational amplifier 9 and a resistor 120 and a rated current circuit comprising another operational amplifier 13 and another resistor 14. On the other hand, the chock load at the landing time can be reduced by changing-over a switch 11 and another switch 15 so that the motor 7 may be driven by the rated voltage circuit during the tool lowering step while by the rated current circuit after the tool landing time. |
