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发明名称
FABRICATION OF GROUP III-V COMPOUND SEMICONDUCTOR DEVICES HAVING HIGH AND LOW RESISTIVITY REGIONS
摘要
申请公布号
EP0162061(B1)
申请公布日期
1989.01.04
申请号
EP19840903905
申请日期
1984.10.18
申请人
AMERICAN TELEPHONE AND TELEGRAPH COMPANY
发明人
ANTHONY, PHILIP, JOHN;HARTMAN, ROBERT, LOUIS;KOSZI, LOUIS, ALEX;SCHWARTZ, BERTRAM
分类号
H01L21/265;H01L21/266;H01L21/324;H01L21/8252;H01L21/74;H01L21/76;H01L27/15;(IPC1-7):H01L21/324
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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