| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element, an actuator device, a liquid injection head, and a liquid injection apparatus improved in resistance to repeated drive by enhancing rigidity and toughness of a lower electrode. <P>SOLUTION: The piezoelectric element comprises a lower electrode film 60 formed on a substrate, a piezoelectric layer 70 formed on the lower electrode film 60, and an upper electrode film formed on the piezoelectric layer 70. The lower electrode film 60 contains columnar crystals of platinum 61 and an oxide 64 exists in the grain boundaries of the platinum crystals 61a. <P>COPYRIGHT: (C)2008,JPO&INPIT |
