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发明名称
BUBBLE TESTER
摘要
申请公布号
JPH01260340(A)
申请公布日期
1989.10.17
申请号
JP19880089911
申请日期
1988.04.11
申请人
NEC CORP
发明人
HASEBE YUTAKA
分类号
G06T1/00;G01M3/06;H01L21/66;H01L23/02;H04N9/04
主分类号
G06T1/00
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代理人
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