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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0233926(A)
申请公布日期
1990.02.05
申请号
JP19880184209
申请日期
1988.07.22
申请人
NEC YAMAGATA LTD
发明人
NAKAMURA NORIO
分类号
C23C14/12;H01L21/312
主分类号
C23C14/12
代理机构
代理人
主权项
地址
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