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经营范围
发明名称
WORKING METHOD OF SEMICONDUCTOR FINE DEVICE
摘要
申请公布号
JPH02183532(A)
申请公布日期
1990.07.18
申请号
JP19890003337
申请日期
1989.01.09
申请人
FUJITSU LTD
发明人
DAIKU HIROSHI;WATANABE SHUJI;ARINAGA KENJI;MIYAMOTO YOSHIHIRO;KUBO KAZUYA
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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