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经营范围
发明名称
SEMICONDUCTOR SURFACE CLEANING
摘要
申请公布号
JPH02218128(A)
申请公布日期
1990.08.30
申请号
JP19890038767
申请日期
1989.02.17
申请人
FUJITSU LTD
发明人
WATANABE SATORU
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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