| 摘要 |
PURPOSE:To interrupt the scattered light of long wave length from a spectroscope used for vacuum ultraviolet light and make possible the spectral diffraction of highly pure short wave length in an X-ray. CONSTITUTION:A detachably mounted filter 36 is provided on a light path between a laser plasma light source 9 and an X-ray detector 23. The filter 36 is composed of a substance of 17 or less in atomic number or its compound, for instance, a boron filter, the X-ray of 20Angstrom or less of a short wave length area is transmitted therethrough and scattered light from a spectroscope 16 used for the X-ray of long wave length and vacuum ultraviolet light is interrupted. In the case where the X-ray of the long wave length is used, the filter 36 is moved out of a light pass by the use of a manipulator 37. |
