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发明名称
CHEMICAL VAPOR DEPOSITION DEVICE
摘要
申请公布号
JPH0371624(A)
申请公布日期
1991.03.27
申请号
JP19900201089
申请日期
1990.07.27
申请人
WATKINS JOHNSON CO
发明人
IMATSUDO MAHAUIRI
分类号
H01L21/205;C23C16/44;C23C16/455;C23C16/52;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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