Geradlinig und linear biegbares Element, hergestellt aus einer einzigen Platte.

摘要

A suspended element (12) etched in a silicon substrate (28) which is deflected in linear proportion to an applied force. A pair of flexing means (16,18,20,22,24,26) symmetrically positioned around the suspended element (12) provides rectilinear movement of the suspended element in response to the applied force. In one embodiment of the invention, the flexing means is formed in a single etchant step by concurrently etching nearly identical recesses (66,68,74,76) into opposing planar surfaces of the silicon substrate (28). In this embodiment, the portions of silicon remaining between the recesses and planar surfaces define the flexing means.