| 摘要 |
<p>PROBLEM TO BE SOLVED: To make a mask preparation device which sufficiently copes with the quality requirement for a mask and to efficiently prepare the mask by obtaining such constitution that the mask can be received and delivered between a mask carriage and a mask washing part and between the mask washing part and a mask inspection and correction part on a condition that a mask surface is inclined by a prescribed angle. SOLUTION: By the mask carriage 120, the mask 180 is received from a normal mask storage case 110 on the condition that the mask surface is almost vertically set and delivered to the mask washing part 130. By the washing part 130, the processed mask 180 is delivered to the mask inspection and correction part 140 on the condition that the angleθ1 of the mask surface is kept as it is. The mask 180 is washed by the washing part 130 and inspected and corrected by the correction part 140. However, the mask 180 can be received and delivered between the respective parts through a rotating roll or a roller on the condition that the respective parts are closely located with each other. Thus, workability is made excellent and the falling accident of the mask 180 is prevented from occurring when the mask is received and delivered.</p> |
