| 摘要 |
PURPOSE:To obtain a three-dimensional acceleration detecting device having a high detecting sensitivity by arranging detecting elements efficiently in a limited space. CONSTITUTION:Four pieces of displacement electrodes 71-74 are arranged in the top surface of a flexible base plate 20. A fixed base plate is arranged over the flexible base plate 20, and fixed electrodes opposite to the displacement electrodes 71-74 are arranged in the fixed base plate respectively. Each displacement electrode 71-74 and the each opposite electrode thereof form each capacity element C1-C4. A cylindrical working body 30 is fixed to the lower surface of the flexible base plate 20, and the flexible base plate 20 is bent on the basis of the acceleration applied to the cylindrical working body 30, and a capacity value of each capacity element C1-C4 is changed. Each capacity value of the capacity elements C1-C4 is converted to each voltage value V1-V4. An X- directional component of the acceleration is obtained with an equation Vx=(V1+V4)-(V2+V3), and a Y-directional component is obtained with an equation Vy=(V1+V2)-(V3+V4), and a Z-directional component is obtained with an equation Vz=V1+V2+V3+V4. |
