| 摘要 |
PROBLEM TO BE SOLVED: To provide a superior piezoelectric-type acceleration sensor of a small size manufactured at a low cost for detecting a planar-directional acceleration of an attached circuit board as an detection object, by setting the direction of the detected acceleration along a plane direction of the circuit board. SOLUTION: An underface electrode 14 of a planar sheet-like piezoelectric element 11 executed with polarization processing along the planar direction is face-joined to a circuit electrode 17 of the circuit board 12 to be mounted, an upper face electrode 15 of the piezoelectric element 11 is constituted, to detect the planar-directional acceleration by face-joining a box type overlapped part 13 and by being joined to an extended electrode 16 of a side face of the overlapped part 13, the two in the element 11 are arranged in the reverse face of the circuit board to be brought into a orthogonal relation with each other in polarization directions, and the circuit board 12 is covered with a cap 28, to be welded, to bring airtight condition, after electrically and mechanically connected by soldering with circuit board 12 onto a lead pin 27a of a sensor base 27 together with a signal processing substrate 26, so as to conduct assembling and manufacturing. |
