发明名称 METHOD OF MANUFACTURING P-TYPE SEMICONDUCTOR FILM AND LIGHT-EMITTING DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To manufacture a p-type II-VI compound semiconductor film and manufacture a light-emitting device, comprising the II-VI compound semiconductor by using the same. SOLUTION: A metal thin film 12 is formed on a c-face sapphire substrate 1, a p-type ZnO thin film 2 doped with As is formed thereon, and an n-type ZnO thin film 5 doped with Al is formed thereon. An upper electrode 13 is provided on the thin film 5, and a lower electrode 14 is provided on the thin film 12.
申请公布号 JP2002016088(A) 申请公布日期 2002.01.18
申请号 JP20010119667 申请日期 2001.04.18
申请人 MURATA MFG CO LTD 发明人 KADOTA MICHIO;NEGORO YASUHIRO;MIURA TOSHINORI
分类号 C23C14/34;H01L21/363;H01L33/28 主分类号 C23C14/34
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