| 摘要 |
<p>PURPOSE:To make it possible to simply make a composite piezoelectric element material which arranges inorganic piezoelectric substances accurately in the desired positions of an organic macromolecule by applying laser beams, in parallel with each direction of two directions which cross each other at right angles, to an inorganic piezoelectric substance bonded to a substrate so as to make cuts in each direction to form columnar body of the inorganic piezoelectric substance. CONSTITUTION:An inorganic piezoelectric substance 1 bonded to a substrate 2 through an adhesive layer 10 is irradiated with laser beams in parallel with the direction shown by 3. Next, it is irradiated with laser beams in parallel with the direction shown by 4 so as to form columnar bodies 11 of the inorganic piezoelectric substance being arranged independently of each other and regularly at its upper side. Next, organic macromolecular material is filled in the cut parts of the inorganic piezoelectric substance 1 of the substance 2 to which the inorganic piezoelectric substance 1 where the columnar body 11 of the inorganic piezoelectric substance are formed was bonded, and then it is hardened so as to form a matrix 5 of the organic macromolecular material, and this is cut at the face of A-A line so as to cut off the substrate 2 and the part, bonded to it, that the inorganic piezoelectric substance 1 continues in the form of comb teeth, thus composite piezoelectric element material is made.</p> |
