METHOD OF DEPOSITING THIN GROUP IIIA METAL FILMS,申请号EP19940922946-传众专利搜索

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发明名称	METHOD OF DEPOSITING THIN GROUP IIIA METAL FILMS
摘要
申请公布号	EP0804631(B1)	申请公布日期	2002.09.25
申请号	EP19940922946	申请日期	1994.07.29
申请人	QINETIQ LIMITED	发明人	JONES, ANTHONY COPELAND
分类号	C01G15/00;C23C16/18;C23C16/20;C23C18/08;C23C18/10;(IPC1-7):C23C16/18	主分类号	C01G15/00
代理机构		代理人
主权项
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