| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably operate an actuator, using a piezoelectric element at high speed. <P>SOLUTION: An actuator includes drive units 12a, 12b that are provided facing a transport stage 11 and move the transport stage 11 in x-axis direction; piezoelectric elements 17a, 17b that are respectively provided in the drive units 12a, 12b and expand and contract in the x-axis direction; a transport electrode 15 provided on the surface of the transport stage 11 on the side of the drive units 12a, 12b; drive electrodes 18a, 18b that are provided on the respective surfaces of the drive units 12a, 12b on the transport stage 11 side and electrostatically chuck the transport electrode 15. Signals that are not synchronized to each other are applied to the piezoelectric elements 17a, 17b. <P>COPYRIGHT: (C)2008,JPO&INPIT |
