| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method that enables manufacture of oscillating body devices, such as oscillating actuators, in which the barycentric balance of an oscillating body is set properly and high reliability and uniform performance are obtained with high productivity. <P>SOLUTION: The manufacturing method is for oscillating body devices, provided with an oscillating body 203a movably supported on an elastic support portion 202a and includes the steps of: processing one and the same substrate 101 to form the oscillating bodies 203a and the elastic support portions 202a of oscillating body devices so that the oscillating bodies 203a of the individual oscillating body devices are coupled together; forming or installing a magnetic material 204a, astride the coupled oscillating bodies 203a of the individual oscillating body devices; simultaneously cutting and separating the coupled oscillating bodies 203a and the magnetic materials 204a, formed or installed astride the individual oscillating bodies 203a. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
