| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for laser beam machining, which apparatus and method can improve the machining efficiency. <P>SOLUTION: In the laser beam machining apparatus 1, the laser beam radiated from a light source portion 10 is reformed by means of a beam shape reforming portion 20 such that the cross section of the laser beam is a shape having a long side in one direction, and then, is converged on a workpiece 2 by means of a converging optical system 30. By this method, the workpiece 2 is machined by generating cracks from the laser beam converged position in the direction perpendicular to the long side. Further, the workpiece 2 can be machined so as to have various shapes because the workpiece 2 is machined by being moved by a moving stage 40, and further because the reform of the cross sectional shape of the laser beam by the beam shape reforming portion 20 is controlled according to the movement of the workpiece 2 by means of the moving stage 40. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
