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发明名称
HEATING APPARATUS ENHANCED IN TEMPERATURE UNIFORMITY ON SUBSTRATE AND CHEMICAL VAPOR DEPOSITION APPARATUS USING THE SAME
摘要
申请公布号
KR20090045984(A)
申请公布日期
2009.05.11
申请号
KR20070111867
申请日期
2007.11.05
申请人
SILTRON INC.
发明人
KIM, JU HYUN
分类号
H01L21/324;H01L21/205
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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