发明名称 |
METHOD OF FORMING A ZINC OXIDE COATED ARTICLE |
摘要 |
The invention described and claimed herein relates to a chemical vapor deposition process for depositing a zinc oxide coating on a substrate by delivering two gaseous precursor streams to a surface of the substrate, and mixing the gaseous precursor streams at the substrate surface for a time sufficiently short so as to form a zinc oxide coating at a deposition rate greater than 5 nm/second. |
申请公布号 |
KR20090061635(A) |
申请公布日期 |
2009.06.16 |
申请号 |
KR20097006351 |
申请日期 |
2007.05.03 |
申请人 |
PILKINGTON GROUP LIMITED;ARKEMA INC. |
发明人 |
ABRAMS MICHAEL B.;KOROTKOV ROMAN Y.;SILVERMAN GARY S.;SMITH RYAN;STRICKER JEFFERY L. |
分类号 |
C23C16/40;C23C16/44 |
主分类号 |
C23C16/40 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|