Device and method for measuring infiltration

摘要

An infiltration measuring device includes a light source, an optical splitter to split a light beam from the light source into a reference light beam and a measuring light beam, a reference optical system provided in an optical path of the reference light beam, a measuring optical system provided in an optical path of the measuring light beam to measure a target object, an optical combiner to combine an optical feedback from the target object with a light beam from the reference optical system, a detector to detect the light beam combined by the optical combiner and convert the combined light beam into a photoelectric conversion signal, an imager to image a cross section of the target object on the basis of the photoelectric conversion signal, a display to display a cross-sectional image formed by the imager, and an applicator to apply an infiltrative material onto the target object.

主权项

1. An infiltration measuring device which measures an infiltration of an infiltrative material into a target object, comprising:
a light source; an optical splitter configured to split a light beam from the light source into a reference light beam and a measuring light beam; a reference optical system provided in an optical path of the reference light beam; a measuring optical system provided in an optical path of the measuring light beam and configured to measure the target object; an optical combiner configured to combine an optical feedback from the target object with a light beam from the reference optical system; a detector configured to detect the light beam combined by the optical combiner and convert the combined light beam into a photoelectric conversion signal; an imager configured to image a cross section of the target object on the basis of the photoelectric conversion signal; a display configured to display a cross-sectional image formed by the imager; an applicator configured to apply the infiltrative material onto the target object; a storage configured to store the cross-sectional image of the target object in time series; and an estimator configured to,
estimate a position of an interface of an infiltrated area of the infiltrative material applied on the target object on the basis of a temporal change in the cross-sectional image stored in the storage by,
obtaining a differential image from a two-dimensional cross-sectional image of the target object in a depth direction and a direction orthogonal to the depth direction, andestimating the position of the interface of the infiltrated area by extracting an initial rising of an image intensity of the differential image in the depth direction.