| 摘要 |
PROBLEM TO BE SOLVED: To provide a force sensor, etc., with which it is possible to reduce the amount of deformation of a membrane to a unit load and improve detection sensitivity.SOLUTION: A force sensor 101 is provided with a plurality of cells configured with a lower electrode 104, a movable part 107 including an upper electrode 109 and having flexibility, and a support part 108 for movably supporting the movable part and forming a gap 106 between the lower electrode and the upper electrode. The plurality of cells are grouped into elements that include at least one cell, the cells being electrically connected to each other within the same element. At the top of the element is provided an elastic layer 127 whose Young's modulus is lower than that of the support part, with a load dispersion plate 128 having higher Young's modulus than the elastic layer provided at the top of the elastic layer.SELECTED DRAWING: Figure 1 |
