Frequency-Characteristics Measurement Method and Positioning Control Device

摘要

A sinusoidal signal that is frequency-swept so as to have a frequency region in which each frequency has a different number of cycles and/or application duration is applied to a control system in a movement device that moves a movement target, time-series data for transmission characteristics obtained from said control system as a result of the application of the aforementioned sinusoidal signal is acquired, and said time-series data is subjected to spectral analysis. This allows the provision of a positioning control device and a frequency-characteristics measurement method that make it possible to optimize measuring precision while minimizing increases in the amount of time it takes to measure frequency characteristics.

主权项

1. A positioning control device comprising:
a signal applying unit configured to apply a sinusoidal signal to a control system in a movement device that moves an object to be moved, the sinusoidal signal being frequency-swept so as to have a frequency region in which at least one of a cycle number and applying duration is different at each frequency; a time-series data acquisition unit configured to acquire time-series data of transmission characteristics acquired from the control system by applying the sinusoidal signal; and a spectrum analyzing unit configured to perform spectral analysis to the time-series data.