Physical quantity sensor and electronic apparatus

摘要

A physical quantity sensor includes a base section, a movable body having a movable electrode section, pivot sections connected to the movable body, and forming a pivot axis of the movable body, a fixation section fixed to the substrate, and adapted to support the movable body via the pivot sections, and a fixed electrode section disposed on the substrate so as to be opposed to the movable electrode section, and the fixation section is provided with opening sections disposed on a line of the pivot axis.

主权项

1. A physical quantity sensor comprising:
a substrate haying a recess and a periphery surrounding the recess; a movable body having a movable electrode; a pivot connected to the movable body, the pivot forming a pivot axis of the movable body; a fixation section fixed on the periphery of the substrate, the pivot interconnecting the fixation section and the movable body such that the movable body is laterally spaced apart from the fixation section via a gap except at the pivot and is suspended above a bottom surface of the recess; an opening that is provided in the fixation section directly adjacent to the pivot; and a fixed electrode disposed on the bottom surface of the recess so as to be opposed to the movable electrode, wherein the opening intersects the pivot axis, the movable body, the pivot, the fixation section and the opening are coplanar in a cross sectional view, the opening is a through hole penetrating entirely through the fixation section and is different from the gap, and the movable body, the pivot and the fixation section is made from a single continuous member.