发明名称 OXIDATION BARRIER LAYER
摘要 A method for producing an oxidation barrier layer on a workpiece substrate in which the oxidation barrier layer is produced by means of physical deposition from the gas phase (PVD) and is an oxide that is materially related to the uncoated surface of the workpiece.
申请公布号 EP3063309(A1) 申请公布日期 2016.09.07
申请号 EP20140795954 申请日期 2014.10.31
申请人 OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON 发明人 RAMM, JÜRGEN;SEIBERT, FLORIAN;WIDRIG, BENO;FOPP-SPORI, DORIS
分类号 C23C14/32;C23C14/00;C23C14/08 主分类号 C23C14/32
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