发明名称 METHOD OF DETECTING THE COMPLETION OF PLASMA ANODIZATION OF A METAL ON A SEMICONDUCTOR BODY
摘要 The method comprises (a) connecting a source of constant current in a series circuit with the plasma and the semiconductor body, (b) periodically illuminating the metal being anodized with light to produce photocurrents when the metal approaches the completion of anodization, (c) monitoring the voltage across the source of constant current, and (d) terminating the plasma anodization when the monitored voltage ceases to fluctuate as a result of the aforementioned periodic illumination.
申请公布号 US3658672(A) 申请公布日期 1972.04.25
申请号 USD3658672 申请日期 1970.12.01
申请人 RCA CORP. 发明人 PETER EDWARD NORRIS
分类号 C23C8/36;H01L21/316;H01L29/00;(IPC1-7):C23B11/02;B01K1/00 主分类号 C23C8/36
代理机构 代理人
主权项
地址