| 摘要 |
PURPOSE:To obtain a photoreceptor always stable in photoconductive characteristics, etc. by laminating on a substrate the first amorphous material layer contg. GexSi1-x, and on this layer the second amorphous material layer contg. Si, and rendering a Ge distribution in the first layer nonuniform in the layer thickness direction. CONSTITUTION:The first layer region 103 made of an amorphous material contg. GexSi1-x(0.95<x<=1) is formed on a substrate 101, and the second layer region 104 made of an amorphous material contg. Si is formed on the region 103 to obtain a photoconductive material 100 having the laminated amorphous material layer 102. A Ge distribution in the region 103 is formed so as to be rich on the side of the substrate 101, poor on the surface side of the material 100, nonuniform in the layer thickness direction, and uniform in a plane parallel to the substrate surface. At least one of the regions 103, 104 contains H or halogen. The photoconductive material thus obtained has high photo-sensitivity to the range of the visible and IR regions and superior durability, etc. |
