| 摘要 |
PURPOSE:To enable certain separation of a pattern from an adjacent pattern by forming a protuberant pattern in advance under the layer to be processed, and transferring the small interval of said patterns just on said protuberant pattern. CONSTITUTION:A protuberant pattern 8 is formed on a substrate 1 in advance at the position at which the small interval of the patterns adjacent to each other is later to be formed. Then, the layer 2 to be processed is formed, and this layer 2 is coated with a photosensitive resin film 3, e.g. by a spin coating method. Thickness of the part of the film 3 just above the protuberant pattern 8 is considerably small as compared with that of the other part. Then, ordinary exposure and development steps are carried out. Development is finished at the small interval 5 almost at the same time as at a large interval 4. As a result, the interval of adjacent patterns can be separated with certainty. |
