| 摘要 |
PURPOSE:To measure sample gas with high accuracy by adding a composite valve consisting of a relief valve and a flow control valve on a gas intake side and adjusting a flow rate. CONSTITUTION:A flow control knob 6 is operated to set the supply amount of the flow control valve 5 at the time of sample gas supply. In this state, a sensor 1 is used to supply the sample gas to the part of a valve 2. At this time, when the supply amount is smaller than a set amount set with the control valve 5, the flow rate is supplied to the sensor 1 as it is. When the supply amount is larger than the set amount set by the control valve 5, an excessive supply amount operates on the relief valve 10 as a pressing force simultaneously with the supply of the set value by the control valve 5 to the sensor 1, and this relief valve 10 is opened to discharge the gas to the atmosphere. In either case, the sample gas is supplied to the sensor side 1 by less than the constant amount at all times. Thus, the gas is measured with high accuracy.
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