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发明名称
THIN-FILM AND COIL INTEGRATED SQUID ELEMENT
摘要
申请公布号
JPH02150786(A)
申请公布日期
1990.06.11
申请号
JP19880304971
申请日期
1988.11.30
申请人
SHIMADZU CORP
发明人
YAMADA YASUHARU
分类号
G01R33/035;H01L39/22
主分类号
G01R33/035
代理机构
代理人
主权项
地址
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