| 摘要 |
<p>PURPOSE:To detect low-concentration impurity gas contained in an atmosphere with much higher sensitivity than conventional sensitivity and to evaluate the amount of the gas. CONSTITUTION:When metallic thin films 2 and 2' are exposed in an atmosphere containing impurity gas, the metallic thin films 2 and 2' are corroded with the impurity gas. Thus the gloss disappears by the corrosion and the like. This phenomenon is utilized, and the time changes of the amounts of the reflected, lights from the metallic thin films 2 and 2' for exposure and reference are measured, respectively. The normalized reflecting intensity at the exposing metallic thin film 2 is computed based on the data.</p> |
