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发明名称
CHEMICAL VAPOR GROWTH DEVICE
摘要
申请公布号
JPH0586476(A)
申请公布日期
1993.04.06
申请号
JP19910250585
申请日期
1991.09.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAGUCHI TORU;YUKI AKIMASA
分类号
C23C16/40;H01L21/31
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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