发明名称 SEMICONDUCTOR DEVICE AND PHOTOMASK
摘要 <p>PURPOSE:To enable the micronization and the high integration of a semiconductor device by lightening the remainder behind the etching at formation of the pattern of the upper layer of a semiconductor device being constituted by two or more layers of transistor gate regions or capacitor region or their combination. CONSTITUTION:This is a layout mainly composed of an element isolating area 1, a lower-layer transistor area 2, an upper-layer transistor gate area 3, and a contact pattern area 5 to a drain area 4, and a layout wherein the end of the lower-layer transistor gate area 2 is projecting as compared with the end of the upper-layer transistor gate area 3.</p>
申请公布号 JPH05235307(A) 申请公布日期 1993.09.10
申请号 JP19920033068 申请日期 1992.02.20
申请人 MATSUSHITA ELECTRON CORP 发明人 ONUMA MAKOTO
分类号 G03F1/08;H01L21/8246;H01L27/112;(IPC1-7):H01L27/112 主分类号 G03F1/08
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