发明名称 EVALUATING DEVICE FOR CANTILEVER
摘要 PROBLEM TO BE SOLVED: To evaluate a plurality of cantilevers without destruction. SOLUTION: A support member 10 for supporting, capable of being mounted/ demounted, one-plane side of a fixed end part 1a of a cantilever 1, an excitation member 6 for vibrating the cantilever 1 through the fixed end part 1a when it is arranged, capable of contacting, on another-plane side of the fixed end part 1a of the cantilever 1 which is supported by this support member 10 and in contact with the other-plane side of the cantilever 1, a pressing member 2 for pressing and holding the fixed end part 1a of the cantilever 1 between the support member 10 and this excitation member 6 in contact with the above other-plane side, a detecting means 4 for detecting the vibration of the cantilever 1 in position to a free end part 1b of the cantilever 1 and outputting a displacement signal, and a frequency analysis device 3 for detecting the characteristic frequency of the cantilever 1 when the displacement signal is inputted from the detecting means 4 as well as the excitation signal is outputted to the excitation member 6, are provided. The cantilever 1 is held between the excitation member 6 which is fixed to the pressing member 2 and the support member 10, thereby it is possible to be mounted/demounted easily and to replace the cantilever without destruction.
申请公布号 JPH10142241(A) 申请公布日期 1998.05.29
申请号 JP19960298872 申请日期 1996.11.11
申请人 OLYMPUS OPTICAL CO LTD 发明人 NAKAMURA YASUSHI
分类号 G01B21/30;B81B3/00;B81C99/00;G01H13/00;G01N29/12;G01N37/00;G01Q60/32;G01Q60/38;G01Q70/08 主分类号 G01B21/30
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