发明名称 DRIVER FOR OSCILLATORY ACTUATOR
摘要 PROBLEM TO BE SOLVED: To simplify the control algorithm by equalizing the acceleration time and the deceleration time at the time of driving an oscillatory actuator thereby determining acceleration control and deceleration control using same parameters. SOLUTION: In the way of a circuit where a control signal for driving an oscillatory actuator 200 functions, means 6 for converting the transfer function depending on the control state of the oscillatory actuator 200 is provided. An identical transfer function is employed at the time of acceleration and deceleration of the actuator by converting the transfer function depending on the control state thereof. Consequently, the transfer function converting means 6 can deal with a same transfer function when the kinetic energy of the oscillatory actuator 200 increases and decreases.
申请公布号 JPH10164873(A) 申请公布日期 1998.06.19
申请号 JP19960320087 申请日期 1996.11.29
申请人 NIKON CORP 发明人 FURUKAWA NOBUYUKI;MOGI KIYOSHI
分类号 B06B1/06;H02N2/00 主分类号 B06B1/06
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